Features :
Square aperture (66 x 66 mm)
100, 200 or 300 µm motion
Closed loop control
Silicon sensor technology
Less than 30pm noise floor
Applications :
Super resolution microscopy
Nanolithography
Particle tracking
Confocal microscopy
| Specifications |
|
| |
|
|
|
|
| |
LF1.100 |
LF1.200 |
LF1.300 |
Unit |
| Range of motion |
100 |
200 |
300 |
µm |
| Resolution |
0.1 |
0.2 |
0.3 |
nm |
| Typical noise floor |
0.01 |
0.02 |
0.03 |
nm |
| Full range repeatability |
0.2 |
0.4 |
0.6 |
nm |
| Linearization |
0.02% |
0.02% |
0.02% |
(typical) |
| Resonant frequency |
500 |
400 |
300 |
Hz |
| Stiffness |
0.6 |
0.5 |
0.4 |
N/µm |
| Maximum Load* : |
|
|
|
|
| - horizontal use |
1 |
kg |
| - vertical use |
0.5 |
kg |
| Sensor |
Silicon HR sensor |
|
| Size W x L x H |
121 x 118 x 13.6 |
mm |
| Material |
Al |
|
| Cable length** |
2 |
m |
| Controller |
Standard |
|
*Higher load on request
*Higher length on request
